MET ONE 3411
As surface geometry for storing massive amounts of data has dramatically decreased, particle monitoring for microelectronics manufacturers has become increasingly important. MET ONE 3411 portable air particle counters are designed to meet the unique demands of semiconductor cleanroom monitoring, process benchmarking and particle troubleshooting applications.
WPortable air particle counter for ISO 14464 cleanroom verification in ISO 1 and 2 environments.
- 0.1 micron sensitivity (range 0.1 μm-1.0 μm)
- Sequential sampling with optional collector
- Fan inactive during operation to minimize particle impact
- Simplified interface for area, location & operating parameter configuration/replication
Choose a MET ONE 3411 Model
Features
Standards
• ISO 14644-1 Class 5 compliant sampling
• ISO 21501-4 compliant for accurate process benchmarking & troubleshooting
Data Management
• Wireless, Ethernet, Serial & USB communication
• Printed or paperless data output
• Open communication architecture
Operation
• Up to 6 particle size channels (2.83 LPM flow rate (0.1 CFM)
• Sequential sampling capability
• Long-life laser technology for improved performance & lower operating costs
Applications
• Semiconductor cleanroom classification & monitoring
• Continuous environmental monitoring
• Process troubleshooting
Product Specifications
| Performance | ISO 21501-4 unit-to-unit accuracy & reproducibility |
| Industry Standards | ISO 21501-4 , 21 CFR Part 11, ISO 14644-1:2015, FCC, CE |
| Light Source | Helium neon laser |
| Particle Size Analysis Range | 0.10|5.00|μm / 0.1|5|μm |
| Coincidence Loss | % at 1,765,000 particles/m3 (per ISO 21501-4 method) |
| Sample Volume | 5.00|µm |
| Throughput | 28.32 L per minute |
| Reporting | EU GMP (2015), ISO 146441-1.2015, FS209E, BS5295, ISO 14644-1:1999 |
| Zero Count | ISO 21501-4 & JIS B 9921 (1 count or less in 5 minutes; 95% Upper Confidence Limit) |
| Counting Efficiency | 50% at 0.1 μm (100% for particles > 0.15 μm per ISO 21501-4 & JIS B 9921) |
| Count Alarms Display and Cycles | User-defined alarm counts, Raw counts: N/CF, N/CM, N/L in cumulative or differential mode |
| Item Specifications Referenced | 2088800-01 |