MET ONE 3411 Portable Air Particle Counter

As surface geometry for storing massive amounts of data has dramatically decreased, particle monitoring for microelectronics manufacturers has become increasingly important. MET ONE 3411 portable air particle counters are designed to meet the unique demands of semiconductor cleanroom monitoring, process benchmarking and particle troubleshooting applications.

Portable air particle counter for ISO 14464 cleanroom verification in ISO 1 and 2 environments.

  • 0.1 micron sensitivity (range 0.1 μm-1.0 μm)
  • Sequential sampling with optional collector
  • Fan inactive during operation to minimize particle impact
  • Simplified interface for area, location & operating parameter configuration/replication

Explore MET ONE 3411 Models

Features

Standards

  • ISO 14644-1 Class 5 compliant sampling

Data Management

  • Wireless, Ethernet, Serial & USB communication
  • Printed or paperless data output
  • Open communication architecture

Operation

  • Up to 6 particle size channels (2.83 LPM flow rate (0.1 CFM)
  • Sequential sampling capability
  • Long-life laser technology for improved performance & lower operating costs

Applications

  • Semiconductor cleanroom classification & monitoring
  • Continuous environmental monitoring
  • Process troubleshooting

Product Specifications

Performance ISO 21501-4 unit-to-unit accuracy & reproducibility
Industry Standards ISO 21501-4 , 21 CFR Part 11, ISO 14644-1:2015, FCC, CE
Light Source Helium neon laser
Coincidence Loss % at 1,765,000 particles/m³ (per ISO 21501-4 method)
Sample Volume 5 µm
Throughput 28.32 L per minute
Reporting EU GMP, ISO 146441-1.2015, FS209E, BS5295, ISO 14644-1:1999
Zero Count ISO 21501-4 & JIS B 9921 (1 count or less in 5 minutes; 95% Upper Confidence Limit)
Counting Efficiency 50% at 0.1 μm (100% for particles > 0.15 μm per ISO 21501-4 & JIS B 9921)
Count Alarms Display and Cycles User-defined alarm counts, Raw counts: N/CF, N/CM, N/L in cumulative or differential mode
Item Specifications Referenced 2088800-01

Content and Resources

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Particle-brochure-met-one-3411-portable-airborne Introducing the MET ONE 3411 0.1 micron sensitivity portable airborne particle counter. Unlike many particle counters the MET ONE 3411 fan remains off when operating in a standard semiconductor cleanroom environment, thus particle generation is virtually eliminated.
particle-counting-air-met-one-3411-pdf Brochure for the MET ONE 3411 air particle counter
Particle-Whitepaper-MET-ONE-3400-Workflow-Efficiencies-1217 Whitepaper by author Tony Harrison, a Compliance and Applications Specialist for Beckman Coulter Life Sciences | Published 2017
METONE-flyer-calibration-services Calibration services flyer about audit-quality calibrations for your MET ONE air particle counter

Technical Documents